Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 403
... illustrated in in Fig.6 . Fig . 6a shows the displacement of the body . when the spring is not so stiff . The movement of body for more stiff spring is shown in Fig.6b . In this case the ejected mass pulls the body toward itself , but ...
... illustrated in in Fig.6 . Fig . 6a shows the displacement of the body . when the spring is not so stiff . The movement of body for more stiff spring is shown in Fig.6b . In this case the ejected mass pulls the body toward itself , but ...
Page 542
... Fig . 4. Tungsten patterns fabricated using the process depicted in Fig . 1 ( a ) . Electron beam lithography is ... shown in Fig . 4 for 0.6 μm thick tungsten seeded on silicon ; this Figure shows high - resolution tungsten fea- tures ...
... Fig . 4. Tungsten patterns fabricated using the process depicted in Fig . 1 ( a ) . Electron beam lithography is ... shown in Fig . 4 for 0.6 μm thick tungsten seeded on silicon ; this Figure shows high - resolution tungsten fea- tures ...
Page 544
... shown in Fig . 6. The total length of each meander ( Fig . 6 ( a ) ) line is 630 μm with a cross - section of 2 μm x 3.5 μm ( thick ) . Figure 6 ( b ) shows a high - magnification image of the serpentine features , including a nodular ...
... shown in Fig . 6. The total length of each meander ( Fig . 6 ( a ) ) line is 630 μm with a cross - section of 2 μm x 3.5 μm ( thick ) . Figure 6 ( b ) shows a high - magnification image of the serpentine features , including a nodular ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus