Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 161
... drive , side - drive and harmonic side- drive . In this work , the micromotors are surface micromachined using heavily - phosphorus - doped polysilicon for the structural material , deposited oxide for the sacrificial layers and LPCVD ...
... drive , side - drive and harmonic side- drive . In this work , the micromotors are surface micromachined using heavily - phosphorus - doped polysilicon for the structural material , deposited oxide for the sacrificial layers and LPCVD ...
Page 166
... side - drive micromotors . Electrical testing of the side - drive and har- monic side - drive motors has concentrated on di- agnostics identifying the key issues affecting motor operation . Frictional forces originating from the ...
... side - drive micromotors . Electrical testing of the side - drive and har- monic side - drive motors has concentrated on di- agnostics identifying the key issues affecting motor operation . Frictional forces originating from the ...
Page 344
... drive motor and reports the operation of this motor and ordinary variable - capacitance side - drive motors without the need for air - levitation assist . Native oxide formation on motor polysilicon surfaces is identified as the cause ...
... drive motor and reports the operation of this motor and ordinary variable - capacitance side - drive motors without the need for air - levitation assist . Native oxide formation on motor polysilicon surfaces is identified as the cause ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
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Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus