Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 462
... silicon wafer with cavities to another silicon wafer results in trapped gases within the sealed cavity . It was of interest to determine the residual pressure of this trapped gas in order to model the behavior of the valve . Starting ...
... silicon wafer with cavities to another silicon wafer results in trapped gases within the sealed cavity . It was of interest to determine the residual pressure of this trapped gas in order to model the behavior of the valve . Starting ...
Page 570
... silicon wafers for the fabrication of microscale mechanisms such as cantilever beams and latching mechanisms . Using this orientation , cantilever beams can be fabricated such that they deflect in a parallel direction the wafer surface ...
... silicon wafers for the fabrication of microscale mechanisms such as cantilever beams and latching mechanisms . Using this orientation , cantilever beams can be fabricated such that they deflect in a parallel direction the wafer surface ...
Page 592
... Silicon Wafers with Low Melting Temperature Glass , " Vol . 2 , pp . 935-938 , June 1990. © Elsevier Sequoia . Silicon Fusion Bonding for Fabrication of Sensors , Actuators and. LESLIE A. FIELD and RICHARD S. MULLER Abstract This paper ...
... Silicon Wafers with Low Melting Temperature Glass , " Vol . 2 , pp . 935-938 , June 1990. © Elsevier Sequoia . Silicon Fusion Bonding for Fabrication of Sensors , Actuators and. LESLIE A. FIELD and RICHARD S. MULLER Abstract This paper ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus