Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 222
... static friction becomes larger than the force trying to slide the plates , the motor stops moving . Figure 14 shows the clamping force F , and the force F , just needed to break the static friction . The angle between these forces is 0 ...
... static friction becomes larger than the force trying to slide the plates , the motor stops moving . Figure 14 shows the clamping force F , and the force F , just needed to break the static friction . The angle between these forces is 0 ...
Page 261
... static mode . 2. Electro Static Force Actuator When some voltages are applied between a couple of conductive plates shown in Fig.1 , it is well known that electron is charged between the plates . This potential attracts these plates ...
... static mode . 2. Electro Static Force Actuator When some voltages are applied between a couple of conductive plates shown in Fig.1 , it is well known that electron is charged between the plates . This potential attracts these plates ...
Page 263
... static force between the electrodes . It can be considered that the displacement of the cantilever will be proportional to the square of the applied voltage since the electro static force is also proportional to the square of the ...
... static force between the electrodes . It can be considered that the displacement of the cantilever will be proportional to the square of the applied voltage since the electro static force is also proportional to the square of the ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus