Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 606
... stress and Young's modulus can be derived . The stress relationship of a beam containing two different materials is given by [ 7 ] : Octc = 01t1 + O2t2 ( 4 ) where σ is the total composite stress , te is the total Oc thickness , 01,2 is ...
... stress and Young's modulus can be derived . The stress relationship of a beam containing two different materials is given by [ 7 ] : Octc = 01t1 + O2t2 ( 4 ) where σ is the total composite stress , te is the total Oc thickness , 01,2 is ...
Page 607
... stress free . However , for many emerging applications , the intrinsic stress cannot be ignored . Using a rigidly clamped circular membrane of radius a , the sensitivity . derived taking into consideration the intrinsic stress is given ...
... stress free . However , for many emerging applications , the intrinsic stress cannot be ignored . Using a rigidly clamped circular membrane of radius a , the sensitivity . derived taking into consideration the intrinsic stress is given ...
Page 673
... stress concentrator in the center . 100 Microns Accel : 19.75kv Mag : Width : 18.566 Microns 8.88Kx Test ID : LSFAN Sample IB : FRACTURE Fig . 3. SEM of a 15 μm wide bridge with a tapered - double- cantilever - beam structure in the ...
... stress concentrator in the center . 100 Microns Accel : 19.75kv Mag : Width : 18.566 Microns 8.88Kx Test ID : LSFAN Sample IB : FRACTURE Fig . 3. SEM of a 15 μm wide bridge with a tapered - double- cantilever - beam structure in the ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus