Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
From inside the book
Results 1-3 of 85
Page 532
... surfaces is induced mainly by surface tension effects . This problem may be avoided by removing the deflection mechanism . Thus , freezing of a water - methanol rinse after sacrificial etching all but eliminates surface ten- sion ...
... surfaces is induced mainly by surface tension effects . This problem may be avoided by removing the deflection mechanism . Thus , freezing of a water - methanol rinse after sacrificial etching all but eliminates surface ten- sion ...
Page 571
... surface to rub against another , it is necessary to have smooth flat surfaces . KOH 111903 25KV X200 i50um Figure 1. Deep grooves etched in ( 110 ) silicon wafers showing the atomically smooth ( 111 ) crystal planes which make up the ...
... surface to rub against another , it is necessary to have smooth flat surfaces . KOH 111903 25KV X200 i50um Figure 1. Deep grooves etched in ( 110 ) silicon wafers showing the atomically smooth ( 111 ) crystal planes which make up the ...
Page 583
... Surface preparation Conclusions The formation of anodic bonds is satisfactorily ex- plained by oxidation of the metal surface into the glass . Sufficient charge transfer occurs to allow the oxidation , and the observation of charge ...
... Surface preparation Conclusions The formation of anodic bonds is satisfactorily ex- plained by oxidation of the metal surface into the glass . Sufficient charge transfer occurs to allow the oxidation , and the observation of charge ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Other editions - View all
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus