Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 88
Page 291
... torque for the variable - capacitance micromotor is required . Thus , the torques of the independent phases are time averaged and summed to yield a total average electric torque . For each phase , the excitation voltage is assumed to be ...
... torque for the variable - capacitance micromotor is required . Thus , the torques of the independent phases are time averaged and summed to yield a total average electric torque . For each phase , the excitation voltage is assumed to be ...
Page 336
... torque computed as a function of the rotor position angle for a number of cases . In all examples the stator cavity diameter is 571.5 microns , the air gaps 41.1 microns wide the anodization coating has ε = 6 , the driving voltage is ...
... torque computed as a function of the rotor position angle for a number of cases . In all examples the stator cavity diameter is 571.5 microns , the air gaps 41.1 microns wide the anodization coating has ε = 6 , the driving voltage is ...
Page 337
... torque and insulator thickness is demonstrated by plotting MAT versus 1 / ( insulator thickness ) . In all cases the torque increases with a decrease in insulator thickness . ( This increase will be somewhat reduced by the electrostatic ...
... torque and insulator thickness is demonstrated by plotting MAT versus 1 / ( insulator thickness ) . In all cases the torque increases with a decrease in insulator thickness . ( This increase will be somewhat reduced by the electrostatic ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus