Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 317
... weight of slider . when the characteristics are being measured . The slider is levitated above the stator which is ... ( weight : 8mg , thickness : 270μm ) . The levitation height from the top of the stator to the bottom of the slider was ...
... weight of slider . when the characteristics are being measured . The slider is levitated above the stator which is ... ( weight : 8mg , thickness : 270μm ) . The levitation height from the top of the stator to the bottom of the slider was ...
Page 408
... weight is a 10mm cubic and its mass is 7.2g . Fig.5 shows the three patterns of rotation of the arm and the voltage ... weight on the arm . Lower curve indicates the movement against the load and the movement decreases as the load weight ...
... weight is a 10mm cubic and its mass is 7.2g . Fig.5 shows the three patterns of rotation of the arm and the voltage ... weight on the arm . Lower curve indicates the movement against the load and the movement decreases as the load weight ...
Page 409
... weights of the second or third arms . ( 2 ) Interferences may occur between the joints , for the joints are held only by friction force . The first problem can be solved by apply- ing a counter weight to each arm to cancel the weight of ...
... weights of the second or third arms . ( 2 ) Interferences may occur between the joints , for the joints are held only by friction force . The first problem can be solved by apply- ing a counter weight to each arm to cancel the weight of ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
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Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus