Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
From inside the book
Results 1-3 of 58
Page 17
... zero voltage , it's a " zero . " For this particular device , if both wires are ones , then the output turns to one . If either wire is one , but not both , or if neither is one , the output stays at zero - that's called an AND gate ...
... zero voltage , it's a " zero . " For this particular device , if both wires are ones , then the output turns to one . If either wire is one , but not both , or if neither is one , the output stays at zero - that's called an AND gate ...
Page 115
... zero away from the capacitor plates , the second term is zero . If the surface passes through the capacitor plates , which are shown as the two disks , then there is zero current passing through the surface , and only the dE / dt term ...
... zero away from the capacitor plates , the second term is zero . If the surface passes through the capacitor plates , which are shown as the two disks , then there is zero current passing through the surface , and only the dE / dt term ...
Page 304
... zero . convergence of the capacitance estimates as a function of the number of segments for various gap separations . The land width in each case is unity , and the rotor offset is zero . Each land is divided into segments of unequal ...
... zero . convergence of the capacitance estimates as a function of the number of segments for various gap separations . The land width in each case is unity , and the rotor offset is zero . Each land is divided into segments of unequal ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Other editions - View all
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus