Treatise on Materials Science and Technology, Volume 1 |
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Page 294
CVD is a coating or deposition process which requires a chemical reaction at the
surface of a heated substrate or deposition surface . This reaction feature
distinguishes CVD from either physical vapor deposition , which is the
condensation of ...
CVD is a coating or deposition process which requires a chemical reaction at the
surface of a heated substrate or deposition surface . This reaction feature
distinguishes CVD from either physical vapor deposition , which is the
condensation of ...
Page 295
For these reasons , the vapor deposition process is quite complex and is not
usually amenable to exact analysis . Nevertheless , considerable effort has gone
into analyzing CVD rate data . In the chemical vapor deposition of tungsten ,
which ...
For these reasons , the vapor deposition process is quite complex and is not
usually amenable to exact analysis . Nevertheless , considerable effort has gone
into analyzing CVD rate data . In the chemical vapor deposition of tungsten ,
which ...
Page 339
... Laboratories for many helpful discussions over the past two years . References
Auck , Y . T . , and Byrne , J . G . ( 1970 ) . In “ Second International Conference
on Chemical Vapor Deposition " ( J . M . Blocher , Jr . and J . C . Withers , eds . ) ...
... Laboratories for many helpful discussions over the past two years . References
Auck , Y . T . , and Byrne , J . G . ( 1970 ) . In “ Second International Conference
on Chemical Vapor Deposition " ( J . M . Blocher , Jr . and J . C . Withers , eds . ) ...
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addition alloys analysis angle applied approach associated assumed atoms average becomes bond boundary calculated complex composite concentration consider constants contribution crystal curvature curve decrease defined dependence deposition determined developed direction discussed displacement distance distribution dynamical effect elastic electron elements energy equal equation exist experimental fibers force fracture function given gives grain grain boundaries Group growth growth path illustrated increase indicate interaction interface internal friction interstitial iron laminate lattice layer length material matrix measured mechanism metal microstructural molecules nitrogen normal nucleation observed obtained occur oxygen particles peak phase plane position possible potential present produce properties region reinforcing relaxation respectively shown in Fig shows single Snoek peak solid solution strain strength stress structure substitutional surface Table temperature tungsten unit values volume waves