Industrial Plasma Engineering: Volume 2 - Applications to Nonthermal Plasma Processing

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CRC Press, Aug 25, 2001 - Science - 658 pages
Written by a leading expert in the field, the paperback edition of Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices that are of commercial interest. The text is suitable for students or in-service users with a physics and calculus background at the sophomore level. These two volumes are intended to be used as textbooks at the senior or first-year graduate level by students from all engineering and physical science disciplines and as a reference source by in-service engineers.
 

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Revisar pag 285, contiene entradas y salidas del sistema de plasma

Contents

22
4
Surface Interactions in Plasma Processing
14
Specialized Techniques and Devices for Plasma Processing
196
Nomenclature
614
Introduction
Surface Interactions in Plasma Processing
1
22
4
25
22
Electrical Arc Discharges in Gases 352
352
Inductive RF Electrical Discharges in Gases 391
391
Capacitive RF Electrical Discharges in Gases 417
417
451
451
461
461
Microwave Electrical Discharges in Gases 464
464
471
471
477
477

Kinetic Theory of Gases 34
34
Atmospheric Pressure Plasma Sources
40
Motion of Charges in Electric and Magnetic Fields 54
54
Characteristics of Plasma 117
69
Vacuum Plasma Sources 74
74
Plasma Reactors for Plasma Processing 113
113
Electron Sources and Beams 159
159
Ion Sources and Beams 189
189
Specialized Techniques and Devices for Plasma Processing 196
196
Ionizing Radiation Sources 223
223
Dark Electrical Discharges in Gases 237
237
Parametric Plasma Effects On Plasma Processing
240
Electrical Glow Discharges in Gases 283
283
Diagnostics for Plasma Processing
284
Plasma Treatment of Surfaces 335
335
490
490
499
499
510
510
Appendices 516
516
517
517
528
528
537
537
551
573
597
597
605
605
612
612
Nomenclature
614
623
623
451
639
Copyright

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