MEMS and Microsystems: Design and ManufactureMicrosystems and MEMS technology is one of the biggest breakthroughs in the area of mechanical and electronic technology in recent years. This is the technology of extremely small and powerful devices, and systems built around them, which have mechanical and electrical components. MEMS technology is expanding rapidly, with major application areas being telecommunications, biomedical technology, manufacturing and robotic systems, transportation and aerospace. Academics are desperate for texts to familiarise future engineers with this broad-ranging technology. This text provides an engineering design approach to MEMS and microsystems which is appropriate for professionals and senior level students. This design approach is conveyed through good examples, cases and applied problems. The book is appropriate for mechanical and aerospace engineers, since it carefully explains the electrical/electronic aspects of the subject. Electrical engineering students will be given strong coverage of the mechanical side of MEMS, something they may not receive elsewhere. |
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Page 15
... Chapter 3 , whereas the application of plasma in microfabrication will be described in Chapter 8 . 5. Scaling laws provide engineers with a sense for the scaling down of physical quantities involved in the design of microdevices . We ...
... Chapter 3 , whereas the application of plasma in microfabrication will be described in Chapter 8 . 5. Scaling laws provide engineers with a sense for the scaling down of physical quantities involved in the design of microdevices . We ...
Page 75
... described in Chapter 9 . The intermolecular forces are electrostatic in nature . Consequently , the distance between molecules , d , plays an important role in determining the magnitude of these forces . Being electrostatic in nature ...
... described in Chapter 9 . The intermolecular forces are electrostatic in nature . Consequently , the distance between molecules , d , plays an important role in determining the magnitude of these forces . Being electrostatic in nature ...
Page 264
... described in Section 5.6.3 in Chapter 5 . 5. The thin Langmuir - Blodgett ( LB ) films can be used to produce multilayer microstructures , similar to the micromachining technique presented in Chapter 9 . 6. Polymers with unique ...
... described in Section 5.6.3 in Chapter 5 . 5. The thin Langmuir - Blodgett ( LB ) films can be used to produce multilayer microstructures , similar to the micromachining technique presented in Chapter 9 . 6. Polymers with unique ...
Common terms and phrases
accelerometer analysis applications atoms beam boundary conditions capacitance capillary chemical coefficient components Constraint base deflection deposition described in Chapter devices diaphragm diffusion dopant doping dynamic electric resistance electrons electrostatic forces engineering Equation etchants etching example fabrication finite element finite element analysis fluid flow fracture geometry heat conduction heat flux heat transfer illustrated in Figure interface involves ions layer LIGA process mask mass maximum mechanical MEMS and microsystems metal micro microaccelerometer microdevices microelectronics microfabrication microfluidics micromanufacturing micropressure sensors microsensors microstructures microsystem design microsystem packaging microvalves molecules n-type output oxidation phonon photolithography photoresist piezoelectric piezoresistors plane plasma plate polymers pressure sensor production pumping ratio reactant scaling shear shown in Figure signal transduction silicon dioxide silicon substrate SiO2 solid solution structure submicrometer substrate materials surface micromachining Table techniques temperature thickness thin films transducers tube velocity vibration voltage wet etching wire bonds Young's modulus