MEMS and Microsystems: Design and ManufactureMicrosystems and MEMS technology is one of the biggest breakthroughs in the area of mechanical and electronic technology in recent years. This is the technology of extremely small and powerful devices, and systems built around them, which have mechanical and electrical components. MEMS technology is expanding rapidly, with major application areas being telecommunications, biomedical technology, manufacturing and robotic systems, transportation and aerospace. Academics are desperate for texts to familiarise future engineers with this broad-ranging technology. This text provides an engineering design approach to MEMS and microsystems which is appropriate for professionals and senior level students. This design approach is conveyed through good examples, cases and applied problems. The book is appropriate for mechanical and aerospace engineers, since it carefully explains the electrical/electronic aspects of the subject. Electrical engineering students will be given strong coverage of the mechanical side of MEMS, something they may not receive elsewhere. |
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Page 38
... means such as electro - osmosis and electrophoresis . Electrohydrodynamics in- volves the driving of an ionized fluid by the application of electric fields . This form of fluid flow will be described in Chapter 3. Isolation and ...
... means such as electro - osmosis and electrophoresis . Electrohydrodynamics in- volves the driving of an ionized fluid by the application of electric fields . This form of fluid flow will be described in Chapter 3. Isolation and ...
Page 68
... means , ( 2 ) optical means , ( 3 ) electrical means . 11. Thermal sensors work on the principle of ( 1 ) thermal mechanics , ( 2 ) thermometers , ( 3 ) thermal electricity . 12. Thermopiles have ( 1 ) one , ( 2 ) two , ( 3 ) three ...
... means , ( 2 ) optical means , ( 3 ) electrical means . 11. Thermal sensors work on the principle of ( 1 ) thermal mechanics , ( 2 ) thermometers , ( 3 ) thermal electricity . 12. Thermopiles have ( 1 ) one , ( 2 ) two , ( 3 ) three ...
Page 304
... means of combined diffusion and chemical reactions . A similar process called epitaxial deposition is used to deposit thin films of reactant over the surface of a substrate of the same material . It is widely used in depositing silicon ...
... means of combined diffusion and chemical reactions . A similar process called epitaxial deposition is used to deposit thin films of reactant over the surface of a substrate of the same material . It is widely used in depositing silicon ...
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Common terms and phrases
accelerometer analysis applications atoms beam boundary conditions capacitance capillary chemical coefficient components Constraint base deflection deposition described in Chapter devices diaphragm diffusion dopant doping dynamic electric resistance electrons electrostatic forces engineering Equation etchants etching example fabrication finite element finite element analysis fluid flow fracture geometry heat conduction heat flux heat transfer illustrated in Figure interface involves ions layer LIGA process mask mass maximum mechanical MEMS and microsystems metal micro microaccelerometer microdevices microelectronics microfabrication microfluidics micromanufacturing micropressure sensors microsensors microstructures microsystem design microsystem packaging microvalves molecules n-type output oxidation phonon photolithography photoresist piezoelectric piezoresistors plane plasma plate polymers pressure sensor production pumping ratio reactant scaling shear shown in Figure signal transduction silicon dioxide silicon substrate SiO2 solid solution structure submicrometer substrate materials surface micromachining Table techniques temperature thickness thin films transducers tube velocity vibration voltage wet etching wire bonds Young's modulus