MEMS and Microsystems: Design and ManufactureMicrosystems and MEMS technology is one of the biggest breakthroughs in the area of mechanical and electronic technology in recent years. This is the technology of extremely small and powerful devices, and systems built around them, which have mechanical and electrical components. MEMS technology is expanding rapidly, with major application areas being telecommunications, biomedical technology, manufacturing and robotic systems, transportation and aerospace. Academics are desperate for texts to familiarise future engineers with this broad-ranging technology. This text provides an engineering design approach to MEMS and microsystems which is appropriate for professionals and senior level students. This design approach is conveyed through good examples, cases and applied problems. The book is appropriate for mechanical and aerospace engineers, since it carefully explains the electrical/electronic aspects of the subject. Electrical engineering students will be given strong coverage of the mechanical side of MEMS, something they may not receive elsewhere. |
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Page 47
... resonant fre- quency of the beam . The shift of the resonant frequency of the beam can be corre- lated to the induced stress and thus to the pressure applied to the silicon diaphragm . Formulas for calculating the corresponding resonant ...
... resonant fre- quency of the beam . The shift of the resonant frequency of the beam can be corre- lated to the induced stress and thus to the pressure applied to the silicon diaphragm . Formulas for calculating the corresponding resonant ...
Page 111
... resonant vibration . X ( t ) α = @n Although the equation for resonant vibration is derived for a simple mass- spring system , resonant vibration occurs in other forms of structures whenever the condition of the applied force frequency ...
... resonant vibration . X ( t ) α = @n Although the equation for resonant vibration is derived for a simple mass- spring system , resonant vibration occurs in other forms of structures whenever the condition of the applied force frequency ...
Page 131
... resonant vibration of the beam is de- tected by the piezoresistors diffused into the ends of the beam . A schematic diagram of this type of pressure sensor is shown in Figure 4.30 . Figure 4.30 | Resonant vibrating beam pressure sensor ...
... resonant vibration of the beam is de- tected by the piezoresistors diffused into the ends of the beam . A schematic diagram of this type of pressure sensor is shown in Figure 4.30 . Figure 4.30 | Resonant vibrating beam pressure sensor ...
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accelerometer analysis applications atoms beam boundary conditions capacitance capillary chemical coefficient components Constraint base deflection deposition described in Chapter devices diaphragm diffusion dopant doping dynamic electric resistance electrons electrostatic forces engineering Equation etchants etching example fabrication finite element finite element analysis fluid flow fracture geometry heat conduction heat flux heat transfer illustrated in Figure interface involves ions layer LIGA process mask mass maximum mechanical MEMS and microsystems metal micro microaccelerometer microdevices microelectronics microfabrication microfluidics micromanufacturing micropressure sensors microsensors microstructures microsystem design microsystem packaging microvalves molecules n-type output oxidation phonon photolithography photoresist piezoelectric piezoresistors plane plasma plate polymers pressure sensor production pumping ratio reactant scaling shear shown in Figure signal transduction silicon dioxide silicon substrate SiO2 solid solution structure submicrometer substrate materials surface micromachining Table techniques temperature thickness thin films transducers tube velocity vibration voltage wet etching wire bonds Young's modulus