Optical Inspection of Microsystems

Front Cover
Wolfgang Osten
CRC Press, Oct 3, 2018 - Science - 503 pages
Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands.

Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts.

Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

From inside the book

Contents

Chapter 2 Image Correlation Techniques for Microsystems Inspection
55
Chapter 3 Light Scattering Techniques for the Inspection of Microcomponents and Microstructures
103
Chapter 4 Characterization and Measurement of Microcomponents with the Atomic Force Microscope AFM
121
Chapter 5 Optical Profiling Techniques for MEMS Measurement
145
Chapter 6 Grid and Moiré Methods for Micromeasurements
163
Chapter 7 Grating Interferometry for InPlane Displacement and Strain Measurement of Microcomponents
201
Chapter 8 Interference Microscopy Techniques for Microsystem Characterization
217
Chapter 9 Measuring MEMS in Motion by Laser Doppler Vibrometry
245
Chapter 10 An Interferometric Platform for Static QuasiStatic and Dynamic Evaluation of OutofPlane Deformations of MEMS and MOEMS
293
Chapter 11 Optoelectronic Holography for Testing Electronic Packaging and MEMS
325
Chapter 12 Digital Holography and Its Application in MEMSMOEMS Inspection
351
Chapter 13 Speckle Metrology for Microsystem Inspection
427
Chapter 14 Spectroscopic Techniques for MEMS Inspection
459
Index
483
Back cover
505
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Osten, Wolfgang

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