Low-dielectric Constant Materials

Front Cover
Materials Research Society, 1998 - Electric insulators and insulation

From inside the book

Contents

Overview of Process Integration Issues for LowK Dielectrics
3
Fundamental Aspects of Polymer Metallization
15
LiquidPhase Deposition of LowK Organic
27
Copyright

41 other sections not shown

Other editions - View all

Common terms and phrases

Bibliographic information