Low-dielectric Constant MaterialsMaterials Research Society, 1998 - Electric insulators and insulation |
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Page 41
IR spectra were obtained using a Nicolet Magna - IR Spectrometer 550 coupled
with Ominic Version 2 . 0 software at a resolution of 4 cm ' and taking 16 scans
per spectrum . Dielectric measurements were carried out with a Hewlett - Packard
...
IR spectra were obtained using a Nicolet Magna - IR Spectrometer 550 coupled
with Ominic Version 2 . 0 software at a resolution of 4 cm ' and taking 16 scans
per spectrum . Dielectric measurements were carried out with a Hewlett - Packard
...
Page 81
Figure 5a shows the FTIR spectra for the 10 / 100 pulsed films . CFx species
generally absorb from 980 - 1450 cm * ' , 16 and CF2 and CF stretches can be
identified in each of the spectra . Of particular interest , however , is the CH
stretch ...
Figure 5a shows the FTIR spectra for the 10 / 100 pulsed films . CFx species
generally absorb from 980 - 1450 cm * ' , 16 and CF2 and CF stretches can be
identified in each of the spectra . Of particular interest , however , is the CH
stretch ...
Page 148
The polarized FTIR spectra of blanket film collected in transmission mode can
show preferred molecular orientations in the ... the spectra of collected using
parallel ( x direction ) and perpendicular ( ydirection ) polarizations are identical ,
which ...
The polarized FTIR spectra of blanket film collected in transmission mode can
show preferred molecular orientations in the ... the spectra of collected using
parallel ( x direction ) and perpendicular ( ydirection ) polarizations are identical ,
which ...
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Contents
Overview of Process Integration Issues for LowK Dielectrics | 3 |
Fundamental Aspects of Polymer Metallization | 15 |
LiquidPhase Deposition of LowK Organic | 27 |
Copyright | |
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