Glass, Volume 26Minoru Tomozawa, R. H. Doremus Academic Press, 1977 - Glass |
From inside the book
Results 1-3 of 68
Page 35
... measured film density . The exact number is very reproducible in a given etching apparatus with reproducible agitation and temperature but varies ... measured by measuring the magnitude of 1 35 SILICON DIOXIDE FILMS IN SEMICONDUCTOR DEVICES.
... measured film density . The exact number is very reproducible in a given etching apparatus with reproducible agitation and temperature but varies ... measured by measuring the magnitude of 1 35 SILICON DIOXIDE FILMS IN SEMICONDUCTOR DEVICES.
Page 36
Minoru Tomozawa, R. H. Doremus. Film stress can be measured by measuring the magnitude of the bending of the Si slice ( Irene , 1976 ) . The direction of the bending yields the sign of the stress , i.e. , compressive or tensile . A ...
Minoru Tomozawa, R. H. Doremus. Film stress can be measured by measuring the magnitude of the bending of the Si slice ( Irene , 1976 ) . The direction of the bending yields the sign of the stress , i.e. , compressive or tensile . A ...
Page 290
... measured photoelastically during cooling ; K , is calculated via Eqs . ( 67 ) and ( 69 ) , and EfG ( T ) and & fE ( T ) are measured in the dilatometer during cooling with the same rate as that of the seal . Then 8 ( TR ) can be ...
... measured photoelastically during cooling ; K , is calculated via Eqs . ( 67 ) and ( 69 ) , and EfG ( T ) and & fE ( T ) are measured in the dilatometer during cooling with the same rate as that of the seal . Then 8 ( TR ) can be ...
Contents
vii | 57 |
RONALD E LOEHMAN 119 Sandia National Laboratories Albuquerque | 119 |
HeavyMetal Fluoride Glasses | 151 |
Copyright | |
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absorption coefficient AlF3 analysis Basis for Nuclear bead seal behavior Bendow borosilicate glass bulk glasses bulk modulus CCl4 Ceram chemical composite sphere constant cooling corrosion crystalline crystallization curve dB/km devices dielectric Drexhage effects elastic electrical electron energy fibers fluorohafnate fluorozirconate glasses fused silica glass formation glass transition glass transition temperature glass-clad glass-forming region heavy-metal fluoride glasses increase interface traps ions layers leachability leaching Loehman Lucas materials measured melt metal Mitachi modulus MOSFET Moynihan nitride nitrogen Non-Cryst Nuclear Waste Nuclear Waste Management observed optical optical fibers oxide glasses oxynitride glasses Phys Poulain properties Radioactive Waste radionuclides refractive index Rekhson result sample sandwich seal Scherer seal Eq setting temperature shown in Fig silicon SiO2 SiO2 films Solids solution split ring stiffness ratio stress relaxation structural relaxation studies Subsection substrate surface Table techniques thermal thickness viscoelastic viscosity vitreous vitrification Waste Management waste-glass forms wavelength ZBLA ZBLAN ZrF4