Glass, Volume 26Minoru Tomozawa, R. H. Doremus Academic Press, 1977 - Glass |
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Page 10
... oxide electrically isolates the active devices . Densely populated integrated circuits require such isolation to prevent cross talk between neighboring devices fabricated on a single silicon substrate . The n✶ regions shown in Fig . 3 ...
... oxide electrically isolates the active devices . Densely populated integrated circuits require such isolation to prevent cross talk between neighboring devices fabricated on a single silicon substrate . The n✶ regions shown in Fig . 3 ...
Page 46
... oxide is the result of unintentional con- tamination during the processing of the device that resulted in ... oxide ( Kriegler et al . , 1972 ; Rohatgi et al . , 1977 ) . Mobile ion neutralization by chlorination of oxides has been ...
... oxide is the result of unintentional con- tamination during the processing of the device that resulted in ... oxide ( Kriegler et al . , 1972 ; Rohatgi et al . , 1977 ) . Mobile ion neutralization by chlorination of oxides has been ...
Page 47
... oxide . The other major category of charge is immobile charge arising from a variety of miscellaneous sources ; it is grouped under the name oxide trapped charge . These charges result from traps in the oxide being filled by carriers ...
... oxide . The other major category of charge is immobile charge arising from a variety of miscellaneous sources ; it is grouped under the name oxide trapped charge . These charges result from traps in the oxide being filled by carriers ...
Contents
vii | 57 |
RONALD E LOEHMAN 119 Sandia National Laboratories Albuquerque | 119 |
HeavyMetal Fluoride Glasses | 151 |
Copyright | |
3 other sections not shown
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absorption coefficient AlF3 analysis Basis for Nuclear bead seal behavior Bendow borosilicate glass bulk glasses bulk modulus CCl4 Ceram chemical composite sphere constant cooling corrosion crystalline crystallization curve dB/km devices dielectric Drexhage effects elastic electrical electron energy fibers fluorohafnate fluorozirconate glasses fused silica glass formation glass transition glass transition temperature glass-clad glass-forming region heavy-metal fluoride glasses increase interface traps ions layers leachability leaching Loehman Lucas materials measured melt metal Mitachi modulus MOSFET Moynihan nitride nitrogen Non-Cryst Nuclear Waste Nuclear Waste Management observed optical optical fibers oxide glasses oxynitride glasses Phys Poulain properties Radioactive Waste radionuclides refractive index Rekhson result sample sandwich seal Scherer seal Eq setting temperature shown in Fig silicon SiO2 SiO2 films Solids solution split ring stiffness ratio stress relaxation structural relaxation studies Subsection substrate surface Table techniques thermal thickness viscoelastic viscosity vitreous vitrification Waste Management waste-glass forms wavelength ZBLA ZBLAN ZrF4