Treatise on Materials Science and Technology, Volume 2; Volume 19, Part 1 |
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Page 214
High Rate Sputtering Systems - - - - - - Both triode and magnetron sputtering
systems are capable of producing thick ... ( 1 ) the thermionic electron emitting
tungsten filament , ( 2 ) the anode , and ( 3 ) the cathode or sputtering target ( Fig .
1 ) .
High Rate Sputtering Systems - - - - - - Both triode and magnetron sputtering
systems are capable of producing thick ... ( 1 ) the thermionic electron emitting
tungsten filament , ( 2 ) the anode , and ( 3 ) the cathode or sputtering target ( Fig .
1 ) .
Page 236
Atoms can be sputtered from the chamber walls and shield surfaces with high
energy reflected atoms or by ions accelerated toward the shields if the chamber
potential is above the threshold voltage for sputtering . Thus , if possible , it is ...
Atoms can be sputtered from the chamber walls and shield surfaces with high
energy reflected atoms or by ions accelerated toward the shields if the chamber
potential is above the threshold voltage for sputtering . Thus , if possible , it is ...
Page 244
An interesting related observation was the formation of a beautiful , emerald
green plasma due to evaporation and ionization of Mg from a composite
sputtering target containing Mg . The observation was short lived , however ,
because the ...
An interesting related observation was the formation of a beautiful , emerald
green plasma due to evaporation and ionization of Mg from a composite
sputtering target containing Mg . The observation was short lived , however ,
because the ...
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Contents
R JAMES | 2 |
Principles of XRay Stress Measurement | 4 |
Control of Accuracy and Precision | 25 |
Copyright | |
15 other sections not shown
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absorption additional allows alloy angle Appl applications atoms bandgap beam broadening cause coefficients components composition composition profile concentration constant containing cooling crystal curve defects dependent deposits depth determined developed diffraction diffusion direction discussed dislocation distance distribution effect electron elements employed energy error et al example excitation experimental factor field function give given grain heat important included increasing intensity intensity bands iron laser lattice layer less magnetic material measurements Metals method Mössbauer observed obtained occur optical parameter peak phase Phys plane position possible powder problem produce range rays recent region relative residual stress sample semiconductors shift shown single Society solid spacing specimen spectra spectrum sputtering steel structure studies substrate surface target technique temperature term thickness values variation volume x-ray