Treatise on Materials Science and Technology, Volume 2; Volume 19, Part 1 |
From inside the book
Results 1-3 of 26
Page 228
TARGET HOLDERS AND SHIELD SPACING ( 3 ) ( 4 ) Water cooling jackets were
provided for all targets used for sputter deposition after learning the problems
inadequate cooling could cause ; i . e . , cone formation ( Section III , A , 2 , a ) ...
TARGET HOLDERS AND SHIELD SPACING ( 3 ) ( 4 ) Water cooling jackets were
provided for all targets used for sputter deposition after learning the problems
inadequate cooling could cause ; i . e . , cone formation ( Section III , A , 2 , a ) ...
Page 229
Target heat loads already are near capacity for sputtering rates currently in use
and will be the limiting factor in achieving still higher rates except for liquid
targets . It may be possible , however , to use rotating targets similar to the
rotating ...
Target heat loads already are near capacity for sputtering rates currently in use
and will be the limiting factor in achieving still higher rates except for liquid
targets . It may be possible , however , to use rotating targets similar to the
rotating ...
Page 243
It was found worthwhile to use well regulated power supplies for all dc power
requirements . A high - voltage ( 2 kV ) , low - current ( 1 A ) dc power supply was
used for the target ( Fig . 1 ) . A smooth dc power output especially was needed
for ...
It was found worthwhile to use well regulated power supplies for all dc power
requirements . A high - voltage ( 2 kV ) , low - current ( 1 A ) dc power supply was
used for the target ( Fig . 1 ) . A smooth dc power output especially was needed
for ...
What people are saying - Write a review
We haven't found any reviews in the usual places.
Contents
R JAMES | 2 |
Principles of XRay Stress Measurement | 4 |
Control of Accuracy and Precision | 25 |
Copyright | |
15 other sections not shown
Other editions - View all
Common terms and phrases
absorption additional allows alloy angle Appl applications atoms bandgap beam broadening cause coefficients components composition composition profile concentration constant containing cooling crystal curve defects dependent deposits depth determined developed diffraction diffusion direction discussed dislocation distance distribution effect electron elements employed energy error et al example excitation experimental factor field function give given grain heat important included increasing intensity intensity bands iron laser lattice layer less magnetic material measurements Metals method Mössbauer observed obtained occur optical parameter peak phase Phys plane position possible powder problem produce range rays recent region relative residual stress sample semiconductors shift shown single Society solid spacing specimen spectra spectrum sputtering steel structure studies substrate surface target technique temperature term thickness values variation volume x-ray