Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 80
Page 136
... research on specific processes or products . Whereas industry can serve the latter need , academe will best respond to the need for microdynamic sciences and thereby also help to supply trained practitioners of this new art . Just as ...
... research on specific processes or products . Whereas industry can serve the latter need , academe will best respond to the need for microdynamic sciences and thereby also help to supply trained practitioners of this new art . Just as ...
Page 137
... research laboratories . The NSF should also support purchases by small research groups to supplement available equipment , processes , and serv- ices . A moderate NSF equipment budget during the first few years of the program would help ...
... research laboratories . The NSF should also support purchases by small research groups to supplement available equipment , processes , and serv- ices . A moderate NSF equipment budget during the first few years of the program would help ...
Page 547
... Research Soc . , Pittsburgh , PA , 1987 , p . 191 . 13 W. Trimmer and R. Jebens , An operational harmonic electrostatic motor , Proc . IEEE Micro Electromechanical Systems Workshop , Salt Lake City , UT , U.S.A. , Feb. 1989 , P. 13 . 14 ...
... Research Soc . , Pittsburgh , PA , 1987 , p . 191 . 13 W. Trimmer and R. Jebens , An operational harmonic electrostatic motor , Proc . IEEE Micro Electromechanical Systems Workshop , Salt Lake City , UT , U.S.A. , Feb. 1989 , P. 13 . 14 ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus