Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 462
Classic and Seminal Papers to 1990 William S. Trimmer. Residual Pressure in Sealed Cavities The bonding of a silicon wafer with cavities to another silicon wafer results in trapped gases within the sealed cavity . It was of interest to ...
Classic and Seminal Papers to 1990 William S. Trimmer. Residual Pressure in Sealed Cavities The bonding of a silicon wafer with cavities to another silicon wafer results in trapped gases within the sealed cavity . It was of interest to ...
Page 552
... cavity must be chosen carefully . If the opening is too large , the cavity will have a flat bottom , appearing bathtub - like rather than FIG . 3. Cross - sectional view of a hemispherical cavity . hemispherical . If the etch window is ...
... cavity must be chosen carefully . If the opening is too large , the cavity will have a flat bottom , appearing bathtub - like rather than FIG . 3. Cross - sectional view of a hemispherical cavity . hemispherical . If the etch window is ...
Page 554
... cavities is first removed and the silicon dioxide layer is photolithographically patterned so that silicon is exposed both in the cavity and in a narrow ring , or flange , around the cavity rim . The remaining oxide acts as a mask when ...
... cavities is first removed and the silicon dioxide layer is photolithographically patterned so that silicon is exposed both in the cavity and in a narrow ring , or flange , around the cavity rim . The remaining oxide acts as a mask when ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus