Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 145
... clamping force pushing the disk firmly onto the sub- strate . Now our variable friend friction has his way , and the disk bearings are developed , this clamping force will remain a domi- may rotate a few steps , or may not budge . Until ...
... clamping force pushing the disk firmly onto the sub- strate . Now our variable friend friction has his way , and the disk bearings are developed , this clamping force will remain a domi- may rotate a few steps , or may not budge . Until ...
Page 374
... clamped at two ends across a 4.5 mm square yoke . The rod is clamped while under torsional strain induced by clamping one end , twisting the rod and clamping the opposite end . In an ancillary experiment , a 10 cm long , 100 μm diameter ...
... clamped at two ends across a 4.5 mm square yoke . The rod is clamped while under torsional strain induced by clamping one end , twisting the rod and clamping the opposite end . In an ancillary experiment , a 10 cm long , 100 μm diameter ...
Page 414
... clamping force which is equivalent to maximum producible force in case of impact drive actuator . The clamping force increases as the electric current increases . The maximum producible force reaches 70 [ gf ] at 1 [ A ] . The force ...
... clamping force which is equivalent to maximum producible force in case of impact drive actuator . The clamping force increases as the electric current increases . The maximum producible force reaches 70 [ gf ] at 1 [ A ] . The force ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus