Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 269
... Dielectric materials , even with a dielectric constant as small as 2 , have profound effects on external electrical fields . A simple example of this is the interaction of a charged particle with a planar face of a large ( compared to ...
... Dielectric materials , even with a dielectric constant as small as 2 , have profound effects on external electrical fields . A simple example of this is the interaction of a charged particle with a planar face of a large ( compared to ...
Page 330
... dielectric constant of the insulator is increased to 20 , the average torque is 29 × 10-4 , and if the dielectric constant is increased to 2000 , the peak torque produced by the motor is 0.7 newtons meters . These dielectric constants ...
... dielectric constant of the insulator is increased to 20 , the average torque is 29 × 10-4 , and if the dielectric constant is increased to 2000 , the peak torque produced by the motor is 0.7 newtons meters . These dielectric constants ...
Page 608
... Dielectric Comp . 1 10 DIMENSIONLESS STRESS 100 Fig . 8 : Theoretical and Measured Pressure Sensitivity of Boron - Doped Silicon Diaphragms with Deposited Dielectric Compensation as a Function of Dimensionless Stress . Pf = 0.347 Ed ...
... Dielectric Comp . 1 10 DIMENSIONLESS STRESS 100 Fig . 8 : Theoretical and Measured Pressure Sensitivity of Boron - Doped Silicon Diaphragms with Deposited Dielectric Compensation as a Function of Dimensionless Stress . Pf = 0.347 Ed ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus