Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 207
... ELECTROSTATIC LINEAR ACTUATOR MANUFACTURED BY SILICON. Section 4 Electrostatic Actuators LECTROSTATIC actuators are governed by the equation ELECTR F au Эх where F is the electrostatic force generated between the plates of the actuator ...
... ELECTROSTATIC LINEAR ACTUATOR MANUFACTURED BY SILICON. Section 4 Electrostatic Actuators LECTROSTATIC actuators are governed by the equation ELECTR F au Эх where F is the electrostatic force generated between the plates of the actuator ...
Page 213
... Electrostatic Micro - Motor W. S. N. TRIMMER and K. J. GABRIEL AT & T Bell Laboratories , Holmdel , N.J. 07733 ( U.S.A. ) ( Received August 12 , 1986 ... electrostatic 213 Design Considerations for a Practical Electrostatic Micro-Motor.
... Electrostatic Micro - Motor W. S. N. TRIMMER and K. J. GABRIEL AT & T Bell Laboratories , Holmdel , N.J. 07733 ( U.S.A. ) ( Received August 12 , 1986 ... electrostatic 213 Design Considerations for a Practical Electrostatic Micro-Motor.
Page 267
... ELECTROSTATIC ACTUATORS Richard H. Price , 1 John E. Wood , 2 and Stephen C. Jacobsen3 Center for Engineering Design ... Electrostatic force generation may offer distinct advantages over more familiar magnetostatics at size scales ...
... ELECTROSTATIC ACTUATORS Richard H. Price , 1 John E. Wood , 2 and Stephen C. Jacobsen3 Center for Engineering Design ... Electrostatic force generation may offer distinct advantages over more familiar magnetostatics at size scales ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus