Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 74
Page 366
... flow . Since the channel is 200 μm long , the flow should become well developed not far down the channel . The average velocity at the output of the channel is found by dividing the volumetric flow given above by the area of the channel ...
... flow . Since the channel is 200 μm long , the flow should become well developed not far down the channel . The average velocity at the output of the channel is found by dividing the volumetric flow given above by the area of the channel ...
Page 448
... flow rate than at large flow rate , this sensor has large sensitivity to small flow . Inlet Outlet One way Valve Silicon Piezo Resistive Pressure Sensor Silicon Pyrex Glass Diaphragm 2 x 2 mm2 20μm thick Fig . 11 Structure of the liquid ...
... flow rate than at large flow rate , this sensor has large sensitivity to small flow . Inlet Outlet One way Valve Silicon Piezo Resistive Pressure Sensor Silicon Pyrex Glass Diaphragm 2 x 2 mm2 20μm thick Fig . 11 Structure of the liquid ...
Page 466
... flow through the microvalve and the pressure drop across the valve . The valve is operated with a drive circuit that can be either a dc voltage or a pulse width modulated signal . The system can be operated with the microvalve sealed ...
... flow through the microvalve and the pressure drop across the valve . The valve is operated with a drive circuit that can be either a dc voltage or a pulse width modulated signal . The system can be operated with the microvalve sealed ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus