Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 232
... force sum with the image and control forces ( and the " corrected " gravity force ) which act on the electret which covers the distal third of the beam ( a was calculated exactly for each coated fiber , based on the actual length and ...
... force sum with the image and control forces ( and the " corrected " gravity force ) which act on the electret which covers the distal third of the beam ( a was calculated exactly for each coated fiber , based on the actual length and ...
Page 315
... force decreases . ROOM TEMPERATURE , OPEN - LOOP LEVITATION OF MICRODEVICES USING. Factor , K 1 1 -3 10 www 10 " 10 " 10 ° 10 ' 10 10 Hr Fig.1 The influence on the force by the relative per- meability . The factor K is ( r - 1 ) / ( Hr + ...
... force decreases . ROOM TEMPERATURE , OPEN - LOOP LEVITATION OF MICRODEVICES USING. Factor , K 1 1 -3 10 www 10 " 10 " 10 ° 10 ' 10 10 Hr Fig.1 The influence on the force by the relative per- meability . The factor K is ( r - 1 ) / ( Hr + ...
Page 319
... force in this actuator , including that produced by eddy currents , was about 10-5N . The estimated value was half of the driving force when the current was 0.4A ( descending curve of Fig.7 ) . It was observed that the drag force had a ...
... force in this actuator , including that produced by eddy currents , was about 10-5N . The estimated value was half of the driving force when the current was 0.4A ( descending curve of Fig.7 ) . It was observed that the drag force had a ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase photoresist plane plate polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus