Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 192
... function is measured by estimating the amplitude of vibration from the envelope of the blurred vibrating structure at a given drive vol- tage and bias voltage . Figure 10 is a comparison of the experi- mental results for the linear ...
... function is measured by estimating the amplitude of vibration from the envelope of the blurred vibrating structure at a given drive vol- tage and bias voltage . Figure 10 is a comparison of the experi- mental results for the linear ...
Page 274
... function of position z , for different separations d , in Figure 3 . 1000 Capacitance C ( x.d ) -vs- Position x . for different separations d TT Rate of Change dC / dx . pF / in Rate of Change dC / dx -vs- Position x . for different ...
... function of position z , for different separations d , in Figure 3 . 1000 Capacitance C ( x.d ) -vs- Position x . for different separations d TT Rate of Change dC / dx . pF / in Rate of Change dC / dx -vs- Position x . for different ...
Page 485
... function of the Reynolds number for nitrogen gas flow in a channel with cross- sectional dimensions of 4.65μm 98.73μm . 0 200 400 600 800 1000 1200 1400 Differential Pressure , KPa Fig . 8 : The flow rate ( Re ) is depicted as a function ...
... function of the Reynolds number for nitrogen gas flow in a channel with cross- sectional dimensions of 4.65μm 98.73μm . 0 200 400 600 800 1000 1200 1400 Differential Pressure , KPa Fig . 8 : The flow rate ( Re ) is depicted as a function ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus