Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
From inside the book
Results 1-3 of 80
Page 311
... geometry of the system components is important in the design of maglev micro - drives because the geometry of the manipulator and magnetic field source strongly influence power consumption and controllability . The optimum geometry is ...
... geometry of the system components is important in the design of maglev micro - drives because the geometry of the manipulator and magnetic field source strongly influence power consumption and controllability . The optimum geometry is ...
Page 599
... geometry used to preserve symmetry . 50 μm pads on 100 μm centers ; symmetry maintained 58 500 chips per 4 " wafer . ( b ) Symmetry abandoned , rectangular chip geometry used . 50 μm pads on 100 μm centers ; symmetry abandoned 68 500 ...
... geometry used to preserve symmetry . 50 μm pads on 100 μm centers ; symmetry maintained 58 500 chips per 4 " wafer . ( b ) Symmetry abandoned , rectangular chip geometry used . 50 μm pads on 100 μm centers ; symmetry abandoned 68 500 ...
Page 649
... geometry of the structure ( position , shape , and connectivity of each component ) , and the material type and associated process conditions used to create each component of the structure . The geometry is passed directly to the ...
... geometry of the structure ( position , shape , and connectivity of each component ) , and the material type and associated process conditions used to create each component of the structure . The geometry is passed directly to the ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus