Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 89
Page 318
... increases , the driving force becomes large due to the increase of the current and the magnetic field . Since the increase of the current causes the gap to decrease , the magnetic field applied to the supercon- ductor is increased . If ...
... increases , the driving force becomes large due to the increase of the current and the magnetic field . Since the increase of the current causes the gap to decrease , the magnetic field applied to the supercon- ductor is increased . If ...
Page 319
... increase itself by the increase of the vertical field component . 7. Conclusions A micro superconducting actuator was fabri- cated and tested . The levitation and driving was achieved by the Meissner effect and the Lorentz force . For ...
... increase itself by the increase of the vertical field component . 7. Conclusions A micro superconducting actuator was fabri- cated and tested . The levitation and driving was achieved by the Meissner effect and the Lorentz force . For ...
Page 684
... increase with Areal resulting in higher μ values . This effect may be minimized by designing a shuttle with only one dimple at its center . Another source of error is the uncertainty of the net normal force , N. Both the applied normal ...
... increase with Areal resulting in higher μ values . This effect may be minimized by designing a shuttle with only one dimple at its center . Another source of error is the uncertainty of the net normal force , N. Both the applied normal ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus