Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 82
Page x
... Mechanical Systems , February 1990 ) . 13.3 CAEMEMS : An Integrated Computer - Aided Engineering Workbench for Micro - Electro - Mechanical Systems S. Crary and Y. Zhang ( Proceedings IEEE Micro Electro Mechanical Systems , February ...
... Mechanical Systems , February 1990 ) . 13.3 CAEMEMS : An Integrated Computer - Aided Engineering Workbench for Micro - Electro - Mechanical Systems S. Crary and Y. Zhang ( Proceedings IEEE Micro Electro Mechanical Systems , February ...
Page 58
... mechanical material , the relevant mechanical characteristics of silicon , and the pro- cessing techniques which are specific to micromechanical structures . Finally , the potentials of this new technology are illustrated by numer- ous ...
... mechanical material , the relevant mechanical characteristics of silicon , and the pro- cessing techniques which are specific to micromechanical structures . Finally , the potentials of this new technology are illustrated by numer- ous ...
Page 59
... mechanical aspects of silicon will be discussed and compared to other more typical mechanical engineering materials . Section III describes the major " micromachining " techniques which have been developed to form the silicon " chips ...
... mechanical aspects of silicon will be discussed and compared to other more typical mechanical engineering materials . Section III describes the major " micromachining " techniques which have been developed to form the silicon " chips ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus