Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 661
... membrane , illustrated schematically at the top . Data for different diaphragm sizes illustrates scaling according to equation ( 1 ) . SUSPENDED MEMBRANE RELEASED STRUCTURE Fig . 3 Process sequences for Fig . 4 suspended membranes and ...
... membrane , illustrated schematically at the top . Data for different diaphragm sizes illustrates scaling according to equation ( 1 ) . SUSPENDED MEMBRANE RELEASED STRUCTURE Fig . 3 Process sequences for Fig . 4 suspended membranes and ...
Page 668
... membrane sample . MEASUREMENT PRINCIPLE Load - Deflection Analysis of Rectangular Membrane is of An analysis of the load - deflection of the rectangular membrane , schematically shown in Fig.1 , with sides 2a and 2b ( a = < b ) has been ...
... membrane sample . MEASUREMENT PRINCIPLE Load - Deflection Analysis of Rectangular Membrane is of An analysis of the load - deflection of the rectangular membrane , schematically shown in Fig.1 , with sides 2a and 2b ( a = < b ) has been ...
Page 669
... membrane is formed by depositing an object film to be measured onto a well - characterized LPCVD silicon nitride membrane . Since the LPCVD silicon nitride membrane is in tensile stress , the total internal stress of the composite membrane ...
... membrane is formed by depositing an object film to be measured onto a well - characterized LPCVD silicon nitride membrane . Since the LPCVD silicon nitride membrane is in tensile stress , the total internal stress of the composite membrane ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus