Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 117
... microdynamical sys- tems , the microscale derivatives of conventional large - scale elec- tromechanical systems . The technology of microdynamics is based on that of microelectronics but calls for important advances over it . The goal ...
... microdynamical sys- tems , the microscale derivatives of conventional large - scale elec- tromechanical systems . The technology of microdynamics is based on that of microelectronics but calls for important advances over it . The goal ...
Page 121
... microdynamical systems making new compo- site materials with specified properties , just as machinery on a larger scale creates fiberglass . The greatest impact of microdynamics will most likely be in consumer products . A strong market ...
... microdynamical systems making new compo- site materials with specified properties , just as machinery on a larger scale creates fiberglass . The greatest impact of microdynamics will most likely be in consumer products . A strong market ...
Page 139
... microdynamics program will enable this new technology to grow as effectively and as quickly as possible . Cost estimates for the national microdynamics laboratory assume that investigators from other institutions will not have to pay an ...
... microdynamics program will enable this new technology to grow as effectively and as quickly as possible . Cost estimates for the national microdynamics laboratory assume that investigators from other institutions will not have to pay an ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase photoresist plane plate polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus