Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 89
Page 168
... operation and decrease to near 70 as the bearings wear out . 1. INTRODUCTION Operation of variable - capacitance ordinary side - drive mi- cromotors was first reported by Fan , Tai , and Muller [ 1,2 ] . Op- eration of similar ...
... operation and decrease to near 70 as the bearings wear out . 1. INTRODUCTION Operation of variable - capacitance ordinary side - drive mi- cromotors was first reported by Fan , Tai , and Muller [ 1,2 ] . Op- eration of similar ...
Page 344
... operation is 5-7 pN - m while that required to initiate motor operation after a 30 seconds rest is nearly twice as high . 1. INTRODUCTION Electrical operation of variable - capacitance side - drive mi- cromotors was first reported by ...
... operation is 5-7 pN - m while that required to initiate motor operation after a 30 seconds rest is nearly twice as high . 1. INTRODUCTION Electrical operation of variable - capacitance side - drive mi- cromotors was first reported by ...
Page 348
... operation , the rotor is intended to be in electrical contact with the shield through mechanical contacts in the ... operation of our motors in room at- mosphere without air levitation is achieved when freshly re- leased motors are ...
... operation , the rotor is intended to be in electrical contact with the shield through mechanical contacts in the ... operation of our motors in room at- mosphere without air levitation is achieved when freshly re- leased motors are ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus