Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 79
Page 18
... outputs . ] Let's suppose that two wires came in here , but we also keep the problem at the output . So we have three outputs : the A that we put in , the B that we put in , and the answer . Well , of course , if you know the A and the ...
... outputs . ] Let's suppose that two wires came in here , but we also keep the problem at the output . So we have three outputs : the A that we put in , the B that we put in , and the answer . Well , of course , if you know the A and the ...
Page 72
... output to a diode detector using an etched V- groove for simple and accurate fiber alignment . ( b ) Coupling a fiber output to a deposited thin - film optical waveguide using a buried etch- stop layer to obtain precise vertical ...
... output to a diode detector using an etched V- groove for simple and accurate fiber alignment . ( b ) Coupling a fiber output to a deposited thin - film optical waveguide using a buried etch- stop layer to obtain precise vertical ...
Page 501
... output voltage of the Wheatstone bridge circuit was amplified to give a maximum output of 5 volts full scale . Standard Arizona " coarse " road dust was used for this test . Arizona " coarse " road dust is a standard mixture of dust ...
... output voltage of the Wheatstone bridge circuit was amplified to give a maximum output of 5 volts full scale . Standard Arizona " coarse " road dust was used for this test . Arizona " coarse " road dust is a standard mixture of dust ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus