Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 23
Page 257
... polyimide beams in the hope of reducing the driving forces required for large - scale deflection . Structures using polyimide - supported plates as thermally isolated structures for gas sensors have been described by Stemme [ 8 ] . In ...
... polyimide beams in the hope of reducing the driving forces required for large - scale deflection . Structures using polyimide - supported plates as thermally isolated structures for gas sensors have been described by Stemme [ 8 ] . In ...
Page 492
... polyimide film deposited over a 3 μm sacrificial aluminum spacer , which is completely removed in a mixture of phosphoric - acetic - nitric acids . water , releasing the suspended polyimide structure . Residual tensile stress the polyimide ...
... polyimide film deposited over a 3 μm sacrificial aluminum spacer , which is completely removed in a mixture of phosphoric - acetic - nitric acids . water , releasing the suspended polyimide structure . Residual tensile stress the polyimide ...
Page 493
... polyimide will be left in the field region to passivate the chip and also reduce the amount by which the element protrudes from the surface . The gaps between the element and the surrounding polyimide can easily be reduced to 10 μm or ...
... polyimide will be left in the field region to passivate the chip and also reduce the amount by which the element protrudes from the surface . The gaps between the element and the surrounding polyimide can easily be reduced to 10 μm or ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus