Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 515
Classic and Seminal Papers to 1990 William S. Trimmer. 2nd Polysilicon 1st Polysilicon Α ' 2nd PSG 1st PSG Α ' Fig . 1. Top view and cross section of a polysilicon micromechanical pin joint . 1st PSG 1st Polysilicon 1st Polysilicon 1st ...
Classic and Seminal Papers to 1990 William S. Trimmer. 2nd Polysilicon 1st Polysilicon Α ' 2nd PSG 1st PSG Α ' Fig . 1. Top view and cross section of a polysilicon micromechanical pin joint . 1st PSG 1st Polysilicon 1st Polysilicon 1st ...
Page 526
Classic and Seminal Papers to 1990 William S. Trimmer. processing required by the polysilicon microstruc- tures , including a thermal cycle that is generally required to relieve the high compressive stress of as - deposited polysilicon ...
Classic and Seminal Papers to 1990 William S. Trimmer. processing required by the polysilicon microstruc- tures , including a thermal cycle that is generally required to relieve the high compressive stress of as - deposited polysilicon ...
Page 532
... Polysilicon Films with Smooth Surfaces H. GUCKEL , J. J. SNIEGOWSKI and T. R. CHRISTENSON Wisconsin Center for Applied Microelectronics , Department of Electrical and Computer Engineering , University of Wisconsin , Madison , WI 53706 ...
... Polysilicon Films with Smooth Surfaces H. GUCKEL , J. J. SNIEGOWSKI and T. R. CHRISTENSON Wisconsin Center for Applied Microelectronics , Department of Electrical and Computer Engineering , University of Wisconsin , Madison , WI 53706 ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus