Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 90
Page 269
... potential difference between VO and that conductor . If Vo is the difference between the external potential and the common potential of the two wires , the force per unit length is [ Price and Phillips , 1988 ] force / length = 1 2s ...
... potential difference between VO and that conductor . If Vo is the difference between the external potential and the common potential of the two wires , the force per unit length is [ Price and Phillips , 1988 ] force / length = 1 2s ...
Page 295
... potential waves , but , following charge relaxation in the rotor and stator - rotor gaps , they lag behind . The result- ing azimuthal displacement between the potential waves and the image charges gives rise to a motive torque acting ...
... potential waves , but , following charge relaxation in the rotor and stator - rotor gaps , they lag behind . The result- ing azimuthal displacement between the potential waves and the image charges gives rise to a motive torque acting ...
Page 298
... potential , field and free charge everywhere within this IM . Expressions are also developed for the motive torque and transverse force of electric origin acting on its rotor . Rather than develop a three - dimensional model of the IM ...
... potential , field and free charge everywhere within this IM . Expressions are also developed for the motive torque and transverse force of electric origin acting on its rotor . Rather than develop a three - dimensional model of the IM ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus