Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 87
Page 252
... produced by the stator is applied on the slider , electric charge is induced on the slider with some lag behind the field . The displacement between the field and the charge causes motive force . Since the induction motor has no ...
... produced by the stator is applied on the slider , electric charge is induced on the slider with some lag behind the field . The displacement between the field and the charge causes motive force . Since the induction motor has no ...
Page 315
... produced on the super- conductor when the magnetic field is 1kG at the sur- face of the superconductor . The levitation using the Meissner effect of superconductors is accomplished by simple structures including cooling systems , and ...
... produced on the super- conductor when the magnetic field is 1kG at the sur- face of the superconductor . The levitation using the Meissner effect of superconductors is accomplished by simple structures including cooling systems , and ...
Page 517
... produced using the self - constraining - joint pro- cess described above and one extra mask for anchoring to the substrate ( three masks in all ) . F. Polysilicon Springs Mechanical energy storage is important in many sys- tems , and ...
... produced using the self - constraining - joint pro- cess described above and one extra mask for anchoring to the substrate ( three masks in all ) . F. Polysilicon Springs Mechanical energy storage is important in many sys- tems , and ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus