Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 67
Page 408
... rotation of the arm and the voltage pattern applied to the piezos . The first rotation corresponds to a rapid extension , the second to a combination type . And the third rotation corresponds to a sudden stop . the Fig.6 shows the ...
... rotation of the arm and the voltage pattern applied to the piezos . The first rotation corresponds to a rapid extension , the second to a combination type . And the third rotation corresponds to a sudden stop . the Fig.6 shows the ...
Page 409
... rotation and the driving voltage for the direction x . There interfer- ences to the rotations for the direction Y ... rotation . The second arm has just the same configuration as the dimensional rotating joint introduced before , except ...
... rotation and the driving voltage for the direction x . There interfer- ences to the rotations for the direction Y ... rotation . The second arm has just the same configuration as the dimensional rotating joint introduced before , except ...
Page 676
... rotate . Consider the effect on a vector F of this axial rotation . If the rotation is around the basis vector V3 for an angle A3 , the new vector F ' can be expressed as R3F , where R3 is the appropriate rotation operator [ 4 ] . In ...
... rotate . Consider the effect on a vector F of this axial rotation . If the rotation is around the basis vector V3 for an angle A3 , the new vector F ' can be expressed as R3F , where R3 is the appropriate rotation operator [ 4 ] . In ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus