Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 90
Page 8
... scale lathe . For in- stance , if I made a billion little lathes , each 1/4000 of the scale of a regular lathe , there are plenty of materials and space available because in the billion little ones there is less than 2 per cent of the ...
... scale lathe . For in- stance , if I made a billion little lathes , each 1/4000 of the scale of a regular lathe , there are plenty of materials and space available because in the billion little ones there is less than 2 per cent of the ...
Page 310
... scale electromagnets . ( See the discussion of single wire drive below . ) Hence highly accurate coarse systems may be an interesting direction for future research . The scale of the system components also plays a major role in the ...
... scale electromagnets . ( See the discussion of single wire drive below . ) Hence highly accurate coarse systems may be an interesting direction for future research . The scale of the system components also plays a major role in the ...
Page 373
... scale actuator made of thin ( 100 μm ) SMA wire ( Nitinol ) under torsional strain that is capable of creating repeat- able , continuous and directional angular deflections . Section 2 describes previous designs of both macro - scale ...
... scale actuator made of thin ( 100 μm ) SMA wire ( Nitinol ) under torsional strain that is capable of creating repeat- able , continuous and directional angular deflections . Section 2 describes previous designs of both macro - scale ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus