Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 512
... shaft often breaks allowing the rotor to come loose ( Fig . 9 ) . Shaft cap fracture has been the only mode of failure observed for these structures thus far . This is most likely due to vertical motion of the rotor introduced by ...
... shaft often breaks allowing the rotor to come loose ( Fig . 9 ) . Shaft cap fracture has been the only mode of failure observed for these structures thus far . This is most likely due to vertical motion of the rotor introduced by ...
Page 513
... shaft of the right gear in Fig . 9. Note the tight clearance between the shaft and the gear ( i.e. , 1.2 μm on each side ) and the top view of the annular bear- ing step near the shaft . VI . CONCLUSION Silicon microfabrication ...
... shaft of the right gear in Fig . 9. Note the tight clearance between the shaft and the gear ( i.e. , 1.2 μm on each side ) and the top view of the annular bear- ing step near the shaft . VI . CONCLUSION Silicon microfabrication ...
Page 643
... shaft that have been created using the mask set shown and a possible process sequence given below : DPOS SHAFT 1 30um APR PR1 2um EXP PR1 LEVEL1 LF DEV PR1 RIE SHAFT 30um RIEF2 STRIP PR1 GOX SACOX ( SUBSTR SHAFT ) 1.0um 50 DPOS GEAR 1 ...
... shaft that have been created using the mask set shown and a possible process sequence given below : DPOS SHAFT 1 30um APR PR1 2um EXP PR1 LEVEL1 LF DEV PR1 RIE SHAFT 30um RIEF2 STRIP PR1 GOX SACOX ( SUBSTR SHAFT ) 1.0um 50 DPOS GEAR 1 ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase photoresist plane plate polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus