Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 148
... silicon nitride in con- tact with polycrystalline silicon than is the case with two layers of polycrystalline silicon . We have therefore fabricated the stepping micro - motors using silicon nitride as the hub material . Fabrication and ...
... silicon nitride in con- tact with polycrystalline silicon than is the case with two layers of polycrystalline silicon . We have therefore fabricated the stepping micro - motors using silicon nitride as the hub material . Fabrication and ...
Page 465
... silicon nitride is deposited on both sides of a double - side polished ( 100 ) silicon wafer . The base plate electrode metal is deposited and patterned on the front side of the wafer . Then the electrode plate is passivated with a ...
... silicon nitride is deposited on both sides of a double - side polished ( 100 ) silicon wafer . The base plate electrode metal is deposited and patterned on the front side of the wafer . Then the electrode plate is passivated with a ...
Page 669
... silicon nitride , LPCVD polysilicon , and plasma - CVD silicon nitride . Silicon nitride and polysilicon are the dominant film Fig . 4 of a computerized Block diagram measurement system . materials for MEMS , such as micro diaphragm ...
... silicon nitride , LPCVD polysilicon , and plasma - CVD silicon nitride . Silicon nitride and polysilicon are the dominant film Fig . 4 of a computerized Block diagram measurement system . materials for MEMS , such as micro diaphragm ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus