Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 518
... stress is found in LPCVD poly- silicon after deposition . Previous papers [ 3 ] , [ 4 ] have de- scribed useful ways to study uniform stress distributions . The stress distribution in the direction of polysilicon film growth is ...
... stress is found in LPCVD poly- silicon after deposition . Previous papers [ 3 ] , [ 4 ] have de- scribed useful ways to study uniform stress distributions . The stress distribution in the direction of polysilicon film growth is ...
Page 519
... stress in the spring max is Mh / 21 . Using these equivalents in ( 2 ) , we ... distribution of crystalline orientations in our films , and published ... distribution function derived from analysis of the X - ray diffraction data . This ...
... stress in the spring max is Mh / 21 . Using these equivalents in ( 2 ) , we ... distribution of crystalline orientations in our films , and published ... distribution function derived from analysis of the X - ray diffraction data . This ...
Page 539
... distribution and the mechanical bending of the tweezers ' beams are used to calculate the time - resolved motion and ... stress microstructures . For many materials , process compatibility with silicon processes and obtaining low - stress ...
... distribution and the mechanical bending of the tweezers ' beams are used to calculate the time - resolved motion and ... stress microstructures . For many materials , process compatibility with silicon processes and obtaining low - stress ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus