Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Page 27
... Substrate Resistivity Ps.ohm cm 100 Fig . 8. Detector pinch - off voltage as a function of oxide charge and substrate resistivity ( assuming ~ 500 cm2 - volt - 1.sec ̄1 ) . Following Shockley's gradual channel approximation [ 8 ] we set ...
... Substrate Resistivity Ps.ohm cm 100 Fig . 8. Detector pinch - off voltage as a function of oxide charge and substrate resistivity ( assuming ~ 500 cm2 - volt - 1.sec ̄1 ) . Following Shockley's gradual channel approximation [ 8 ] we set ...
Page 145
... substrate containing appro- priate drive electrodes as shown in Fig . 2.1 . By applying volt- ages between the substrate electrodes and the disk electrodes , Electrodes forces are generated which tend to pull the electrodes together ...
... substrate containing appro- priate drive electrodes as shown in Fig . 2.1 . By applying volt- ages between the substrate electrodes and the disk electrodes , Electrodes forces are generated which tend to pull the electrodes together ...
Page 446
... substrate . In forward operation ( pressure is applied from the back side of the substrate ) , the valve lid is risen by the pressure in balance with the elasticity of the support arms , and the liquid flows through the gap between the ...
... substrate . In forward operation ( pressure is applied from the back side of the substrate ) , the valve lid is risen by the pressure in balance with the elasticity of the support arms , and the liquid flows through the gap between the ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus