Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 75
Page 101
... techniques are available to make micro structures , actuators and sensors [ 622 ] . Rapid progress in this area has been made on micromachin- ing silicon using anisotorpic etches developed for the electronics industry . Modifying these ...
... techniques are available to make micro structures , actuators and sensors [ 622 ] . Rapid progress in this area has been made on micromachin- ing silicon using anisotorpic etches developed for the electronics industry . Modifying these ...
Page 565
... techniques , several microelectronic devices have been developed . These include ultrathin tungsten strings with 300A to 600 x 2000A * , ranging from 300 x loops , and tungsten cladded pyramids . cross - sections tungsten can Initial ...
... techniques , several microelectronic devices have been developed . These include ultrathin tungsten strings with 300A to 600 x 2000A * , ranging from 300 x loops , and tungsten cladded pyramids . cross - sections tungsten can Initial ...
Page 567
... technique is shown in Fig . 6. The loop to the right has a diameter of 4.5μm . the By increasing the thicknesses of the two polysilicon layers and employing RIE etching techniques , circular loops can be processed which , in principle ...
... technique is shown in Fig . 6. The loop to the right has a diameter of 4.5μm . the By increasing the thicknesses of the two polysilicon layers and employing RIE etching techniques , circular loops can be processed which , in principle ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase photoresist plane plate polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus