Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
From inside the book
Results 1-3 of 79
Page 389
... thin film of reversible TiNi alloy was developed successfully will be explained as follows . At first , TiNi thin films 10μm thick were made on NaCl plates by a magnetron sputtering method . This thin films were separated easily from ...
... thin film of reversible TiNi alloy was developed successfully will be explained as follows . At first , TiNi thin films 10μm thick were made on NaCl plates by a magnetron sputtering method . This thin films were separated easily from ...
Page 663
... thin condensed films " , in G. Haas and R. E. Thun ( eds . ) , Physics of Thin Films , vol . 3 , PP . 211-273 , 1966 . D. S. Campbell , films " , " Mechnanical properties of thin in L. I. Maissel and R. Glang ( eds . ) , Handbook of Thin ...
... thin condensed films " , in G. Haas and R. E. Thun ( eds . ) , Physics of Thin Films , vol . 3 , PP . 211-273 , 1966 . D. S. Campbell , films " , " Mechnanical properties of thin in L. I. Maissel and R. Glang ( eds . ) , Handbook of Thin ...
Page 672
... Thin Films University of California at Berkeley , Department of Electrical Engineering and Computer Sciences and the Electronics Research Laboratory , Berkeley Sensor & Actuator Center * , Berkeley , CA 94720 ( U.S.A. ) Reprinted with ...
... Thin Films University of California at Berkeley , Department of Electrical Engineering and Computer Sciences and the Electronics Research Laboratory , Berkeley Sensor & Actuator Center * , Berkeley , CA 94720 ( U.S.A. ) Reprinted with ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase photoresist plane plate polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus