Micromechanics and MEMS: Classic and Seminal Papers to 1990William S. Trimmer Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
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Results 1-3 of 53
Page 284
... velocity is 4 cm / s . The maximum and the average acceleration deter- mined from the slopes of Fig.19 ( b ) were ... Velocity measurement of the enlarged model at 3.1kV by image processing . ( a ) streak image . ( b ) roller velocity ...
... velocity is 4 cm / s . The maximum and the average acceleration deter- mined from the slopes of Fig.19 ( b ) were ... Velocity measurement of the enlarged model at 3.1kV by image processing . ( a ) streak image . ( b ) roller velocity ...
Page 296
Classic and Seminal Papers to 1990 William S. Trimmer. Rotor Velocity ( krps ) 12 11 10 9 2 1 0 0.00001 0.0001 ( S ) Rotor Conductivity Figure 3 : Rotor velocity versus rotor conductivity . 0.001 windage load torque has little influence ...
Classic and Seminal Papers to 1990 William S. Trimmer. Rotor Velocity ( krps ) 12 11 10 9 2 1 0 0.00001 0.0001 ( S ) Rotor Conductivity Figure 3 : Rotor velocity versus rotor conductivity . 0.001 windage load torque has little influence ...
Page 421
... velocity and the voltage applied to the piezoelectric material for a wide range of frequencies in both the forward and reverse directions . The non - zero voltage intercept of Fig . 6 indicates that there is a minimum voltage , which ...
... velocity and the voltage applied to the piezoelectric material for a wide range of frequencies in both the forward and reverse directions . The non - zero voltage intercept of Fig . 6 indicates that there is a minimum voltage , which ...
Contents
Early Papers in Micromechanics | 1 |
Valves and Pumps | 24 |
Side Drive Actuators | 145 |
Copyright | |
15 other sections not shown
Common terms and phrases
alignment anisotropically etched applied bearing cantilever beam capacitance capacitor charge chip circuit comb components deflection density deposited detector diamagnetic diaphragm dielectric displacement doped drive elec electret electric field electrode electromechanical Electron Devices electrostatic actuators electrostatic force electrostatic motor etchant etching excitation fabrication fiber Figure friction geometry IEEE Micro IEEE Trans input insulation integrated layer levitation linear LPCVD magnetic mask material measured metal microactuators microdynamics micromechanical micromotor nitride operation optical optical fibers output oxide pattern phase plane plate pole faces polysilicon position potential radius ratio resistor rotation rotor scale Sensors and Actuators shape memory alloy shown in Fig side-drive motors silicon nitride silicon wafer SiO2 slider Solid-State Sensors stator stator poles structures substrate superconductor surface switch techniques temperature thermal thickness thin films tion torque Transducers valve voltage wire wobble motor Workshop Young's modulus