Low-dielectric Constant Materials-synthesis and Applications in Microelectronics: Symposium Held April 17-19, 1995, San Francisco, California, U.S.A.

Front Cover
Toh-Ming Lu
Materials Research Society, 1995 - Electric insulators and insulation - 288 pages

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Contents

Methods
3
Low Dielectric Constant Thermosetting Resins
111
Low Thermal Budget Processing of Organic Dielectrics
117
Copyright

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